Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 142, Issue 1, Pages 321-330Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2009.08.006
Keywords
Gas sensors; SnO2; Structure-property relationships; Thickness influence; Thin films
Funding
- World Class University (WCU) [R31-2008-000-10026-0]
- National Research Foundation of Korea (NRF) [2009-0078928]
- Ministry of Education, Science, and Technology (MEST) of Korea
- Ministry of Land, Transport and Maritime Affairs, Korea
- National Research Foundation of Korea [2009-0078928] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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The influence of the thickness of SnO2 films deposited by a spray pyrolysis method on the operating characteristics of gas sensors is analyzed in this paper. It outlines how the thickness of metal oxides is an important parameter for gas sensors in determining the main operating parameters, such as the magnitude and rate of the sensor response and the optimal operating temperature. It is also shown that the optimal film thickness of a gas sensing layer depends on the required sensor parameters. (C) 2009 Elsevier B. V. All rights reserved.
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