Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 137, Issue 1, Pages 334-339Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2008.11.036
Keywords
Electrodeposited iridium oxide films (EIROFs); Neural sensors; Neural prostheses; Microstimulation; Thin-film technology
Funding
- National Nature Science Foundation of China [30570516]
- 863 Program of China [2006AA02Z4E6]
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An efficient and reliable electrochemical method for preparing electrodeposited iridium oxide film (EIROF) microelectrodes by an anodic electrochemical process is reported. The EIROF microelectrodes exhibited remarkably high safe charge injection (Q(inj)) limits of similar to 2.6 mC/cm(2) for anodic-first pulses and similar to 1.4 mC/cm(2) for cathodic-first pulses, and the electrode impedance at 1 kHz was significantly reduced by similar to 92%. The EIROF microelectrodes also exhibited good mechanical and electrochemical stability, as well as an excellent super-Nernstian slope in a broad pH range (1 - 13). All of these characteristics are greatly desired for neural sensor applications including electrical neural microstimulation, neural signal recording as well as pH monitoring in vivo. Moreover, the electrodepositing method can be facilely incorporated into thin-film technology and Microelectromechanical Systems (MEMS). (C) 2008 Elsevier B.V. All rights reserved.
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