Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 129, Issue 2, Pages 666-670Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2007.09.055
Keywords
gallium oxide; nanowires; gas sensor; O-2; CO
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Gallium oxide nanowires were synthesized by a chemical thermal evaporation method using gallium metal as a source material. X-ray diffraction, scanning electron microscopy, and transmission electron microscopy characterizations indicate that the obtained nanowires are well-crystallized single phase monoclinic Ga2O3. Multiple nanowire gas sensors were fabricated by dispensing the Ga2O3 nanowires on an interdigitated Pt-electrode. The Ga2O3 nanowire gas sensors show reversible response to 02 and CO gases in a working temperature range of 100-500 degrees C. A peak response is found at 300 degrees C for O-2 gas and the peak response appears at 200 degrees C for CO gas. For both kinds of gases, the sensor response increases empirically with an increase of gas concentration. The results demonstrate the possibility of using the Ga2O3-based gas sensor at low working temperature field. (C) 2007 Elsevier B.V. All rights reserved.
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