Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 133, Issue 1, Pages 291-295Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2008.02.026
Keywords
thin film; sol-gel; sensor; ammonia
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Thin SiO2-SnOx-AgOy films were prepared, up to 60-100 nm thick, by means of the sol-gel technology and characterized by a variety of analytical techniques. It is shown that the films have an amorphous structure with an inclusion of crystallites of Ag and Sn oxides. The conductance of the films is rather sensitive to the presence of NH3 impurity in air at lower operating temperatures in the range of 20-50 degrees C. (c) 2008 Elsevier B.V. All rights reserved.
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