Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 131, Issue 2, Pages 627-632Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2007.12.062
Keywords
porous silicon; thermal carbonization; chemical oxidation; electrochemical oxidation; electrical isolation; humidity sensing
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The resistance of the thermally carbonized porous silicon (TCPSi) against HF was utilized to etch a second porous layer underneath the TCPSi sensing layer. Three oxidation methods were studied to obtain electrically isolated TCPSi sensing layers for humidity sensing purposes. The present study showed that electrochemical oxidation is propitious for such applications. The other two methods, pyridine-assisted vapor and liquid oxidations, resulted in cracking at the interface of the TCPSi and oxidized M layers. The TCPSi sensor with an electrically isolated sensing layer was five times more sensitive than a typical TCPSi sensor. (c) 2008 Elsevier B.V. All rights reserved.
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