Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 281, Issue -, Pages 124-129Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2018.08.046
Keywords
Wearable pressure sensor; Laser; Microengineering; Electrical property; Electronic skins
Funding
- National Key Research and Development Program of China [2018YFB1105400]
- National Natural Science Foundation of China [51705154, 11502082, 51775188]
- Shanghai Program for Professor of Special Appointment (Eastern Scholar) at Shanghai Institutions of Higher Learning
- Shanghai Rising-Star Program [18QA1401300]
- Shanghai Sailing Program [17YF1403300]
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In this study, a laser-microengineered wearable pressure sensor was developed. The sensor offers a sensing range from 0.005 to 50.0 kPa, a sensitivity approximately -0.107 kPa(-1), and high durability (>10,000 cycles). The finite element simulation shows that the external forces are amplified and transmitted by the laser-engineered microstructures, contributing to the enhanced sensitivity of the device. The laser-microengineered sensors are promising to be applied in the electronic skin for detecting various external stimuli. (C) 2018 Elsevier B.V. All rights reserved.
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