Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 282, Issue -, Pages 174-182Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2018.08.048
Keywords
Piezoelectric inchworm actuator; Driving torque; Self-locking
Funding
- National Natural Science Foundation of China [11672352]
- Fundamental Research Funds for the Central Universities [XJJ2018217]
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One major obstacle to the development of a piezoelectrically-driven actuator with a large motion range is the requirement to provide a high load capacity and a reliable self-locking capability simultaneously for most applications. In this work, a piezo-driven rotary actuator with a simple and compact structure is designed based on the inchworm principle to realize long-range rotary motion. High driving torque with a self-locking capability at rest is achieved by integral design of the overall structure, in which the distributions and stiffness values of the flexure hinges are carefully designed. A prototype was fabricated and the working performance of the device was tested. The test results demonstrate that the driving torque of the prototype is more than 245 Nmm, with self-locking torque of more than 882 Nmm. In addition, the maximum rotary speed is 26.74 mrad/s at a driving frequency of 180 Hz, and a minimum step rotary angle of 4.79 mu rad is obtained at a step driving voltage of 10V. (C) 2018 Elsevier B.V. All rights reserved.
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