Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 216, Issue -, Pages 176-189Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2014.05.031
Keywords
MEMS pressure sensor; Peninsula-structured diaphragm; Sensitivity and linearity; FEM; Sensor fabrication
Funding
- National High-tech R&D Program of China (namely the 863 Program) [2011AA040401]
- National Basic Research Program of China (also called 973 Program) [2011CB309502]
- National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University
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The trade-off between sensitivity and linearity has been the major problem in designing the piezo resistive pressure sensors for low pressure ranges. To resolve the problem, a novel peninsula-structured diaphragm with specially designed piezoresistors was proposed. Finite element method (FEM) was adopted for analyzing the sensor performance as well as comparisons with other sensor structures. In comparison to flat diaphragm, the proposed sensor design could achieve a sensitivity increase by 11.4%, nonlinearity reduction of 60% and resonance frequency increase of 41.8%. In addition, the modified peninsula-structured diaphragms featuring a center boss have been optimized to achieve ultra-low nonlinearities of 0.018%FFS and 0.07%FFS for the 5 kPa and 3 kPa pressure ranges respectively with higher sensitivities as compared to the CBM (cross beam membrane) and hollow stiffening structures. In accordance with the FEM results, the fabricated pressure sensor with the peninsula-structured diaphragm showed a sensitivity of 18.4 mV/V full-scale output and a nonlinearity error of 0.36%FSS in the pressure range 0-5 kPa. The proposed sensor structure is potentially a better choice for designing low pressure sensors. (C) 2014 Elsevier B.V. All rights reserved.
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