Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 201, Issue -, Pages 450-457Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2013.08.009
Keywords
Temperature sensor array; Micro-scale temperature measurement; Through-silicon via; Back side contact
Funding
- Baden-Wuerttemberg Stiftung gGmbH
Ask authors/readers for more resources
A temperature sensor platform of high accuracy and spatial resolution on a silicon substrate is presented. Spatial positioning and high precision are crucial for the thermal measurement of microdevices, where often only small temperature differences occur. This was addressed and solved by a new reusable and easy to mount temperature sensor chip. The sensor array consisted of 64 platinum thermistors arranged in a matrix of 16 rows and 4 columns. The sensors were contacted from the back side. This was realized by new techniques using KOH-etched cavities and metal membranes. Each sensor was realized with a size of 52 mu m x 52 mu m, while the minimum required space per sensor in terms of integration density was 784 mu m x 784 mu m. A thorough calibration and error assessment procedure resulted in a measurement accuracy of 78 mK. The chip may be used for detecting spatial temperature distributions on microchips. Applications are presented for measuring water temperatures directly inside silicon microchannels and for tracking the surface temperature of a chip containing a microchannel. (C) 2013 Elsevier B.V. All rights reserved.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available