Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 189, Issue -, Pages 364-369Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2012.09.012
Keywords
AlN/free-standing diamond; Nucleation side; High frequency; SAW resonators; Pressure sensor
Funding
- Ministerio de Ciencia e Innovacion, under ReADi project [TEC2010-19511]
- Accion Integrada [DE2009-0015]
- Engineering and Physical Sciences Research Council [EP/J009814/1] Funding Source: researchfish
- EPSRC [EP/J009814/1] Funding Source: UKRI
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In this paper, an AlN/free-standing nanocrystal line diamond (NCD) system is proposed in order to process high frequency surface acoustic wave (SAW) resonators for sensing applications. The main problem of synthetic diamond is its high surface roughness that worsens the sputtered AlN quality and hence the device response. In order to study the feasibility of this structure, AlN films from 150 nm up to 1200 nm thick have been deposited on free-standing NCD. We have then analysed the influence of the AlN layer thickness on its crystal quality and device response. Optimized thin films of 300 nm have been used to fabricate of one-port SAW resonators operating in the 10-14 GHz frequency range. A SAW based sensor pressure with a sensibility of 0.33 MHz/bar has been fabricated. (C) 2012 Elsevier B.V. All rights reserved.
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