Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 188, Issue -, Pages 471-480Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2012.03.016
Keywords
Optical integration; Wireless sensor network; Optical sensors; Low coherence interferometry
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A multifunctional optical sensor platform based on the microelectromechanical systems (MEMS) technology is developed with the aim of miniaturizing conventional bulky optical measurement systems for application in future optical wireless sensor networks (WSNs). Low-coherence interferometry is used as the sensing principle, which allows for high performance sensing with multiple heterogeneous sensors. The entire platform with the associated electric circuit has a footprint of 2 in. x 1.8 in. x 0.75 in., which are integrated with a conventional WSN module to form an optical WSN node. The multifunctionality of the platform is successfully demonstrated for simultaneous interrogation of a Fabry-Perot (FP) pressure sensor and a FP temperature sensor. To prove the optical sensor platform's multifunctionality, chemical sensing is also demonstrated with a FP sensor. The multifunctional optical sensor platform and the optical WSN node will enable optical WSNs, which are expected to impact many fronts including those space-constrained applications and monitoring in harsh environments. (C) 2012 Elsevier B.V. All rights reserved.
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