Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 176, Issue -, Pages 64-71Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2012.01.012
Keywords
ZnO microwire; Sensor; Natural gas; Methane; Focused ion beam
Funding
- US Department of Agriculture [58-3148-8-175]
- Supreme Council for Science and Technological Development of the Academy of Sciences of Moldova [036/R, 020RoF]
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A single ZnO microwire detector for the monitoring of natural gas species is described. Single-crystal ZnO microwires were synthesized using a carbothermal reduction vapor phase transport method. It was characterized by XRD, EDX, SEM. Raman and photoluminescence techniques. The sensor structure was fabricated by in situ lift-out method using focused ion beam (FIB) system. The prototype is then functionalized with palladium and used as sensing element. The main advantage of the FIB procedure is a quick verification/testing of concept and is compatible with micro/nanoelectronic devices. A response of 5% was obtained for a single ZnO microwire sensor at 2000 ppm natural gas in the air at room temperature. At 400 degrees C the response increases to 40%. Selectivity to different gasses was investigated and higher response was detected for natural gas. (C) 2012 Elsevier B.V. All rights reserved.
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