Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 187, Issue -, Pages 183-189Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2012.08.040
Keywords
Micropump; Peristaltic; Electrostatic; Valve-less; 3D fabrication
Funding
- National Research Foundation of Korea (NRF)
- Ministry of Education. Science and Technology [2010-0005019]
- Nano-CEMMS (Nanoscale Center for Chemical-Electrical-Mechanical Manufacturing Systems) at the University of Illinois at Urbana-Champaign
- National Science Foundation [0749028]
- Directorate For Engineering
- Div Of Civil, Mechanical, & Manufact Inn [0749028] Funding Source: National Science Foundation
- National Research Foundation of Korea [2010-0005019] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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An electrostatically driven valve-less peristaltic micropump for gas chromatography has been developed. A stepwise chamber was first fabricated using a three-dimensional (3D) fabrication technique known as detachment lithography; the stepwise design was intended to decrease the dead volume of the device and the operation voltage by inducing zipping action. The pump itself was fabricated with a silicon substrate and a polyimide (PI) diaphragm and operated by four electrodes with a 4-phase sequencing actuation. The pump was operated in a range starting from a voltage of 60V and frequency of 4 Hz with a flow rate of 18.2 mu l/min, up to a voltage of 90V at a frequency of 6 Hz with a maximum flow rate of 33.1 mu l/min. The results showed that the minimum operating voltage of the stepwise chamber was approximately 30% lower than that of a vertical chamber with the same depth, and the power consumption per unit flow rate was also decreased by about 10%. (C) 2012 Elsevier B.V. All rights reserved.
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