Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 175, Issue -, Pages 132-138Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2011.12.034
Keywords
MEMS; Unimorph actuator; Fully covered; PZT thick film; Secondary converse Piezoelectric effect
Funding
- National Basic Research Program of China (973 Program) [2011CB302101]
- Fundamental Research Funds for the Central Universities [WK2090090008]
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This paper investigates the influence of secondary converse piezoelectric effect (SCPE) on the deflection of fully covered piezoelectric (PZT) actuators. An analytical model based on the theory of plates and shells as well as a finite element model (FEM) is developed to predict the deflection of the actuator with and without SCPE. Experimental results of the fabricated disc-type and ring-type thick-film Pa actuators agree with both analytical and FEM results. After the influence of SCPE is eliminated, the deflections of disc-type and ring-type actuators with 0.6 electrode radius ratio increase by similar to 12.7% and similar to 21.2%, respectively. Furthermore, the effects of the electrode size and PZT/Si thickness ratio on SCPE are investigated. The maximum influence of SCPE on deflection can be more than 20% for both types of actuators, which should not be neglected in practical applications. (C) 2011 Elsevier B.V. All rights reserved.
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