Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 167, Issue 2, Pages 389-397Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2011.03.023
Keywords
Branched carbon nanostructures; Carbon nanotubes; Micro electromechanical actuator; Sensor
Funding
- Research Council of the University of Tehran
Ask authors/readers for more resources
Novel, high capacitance interdigital structures based on branched carbon nanotubes (B-CNTs) are realized using plasma enhanced chemical vapor deposition. Extensive overlapping between parallel fingers due to the branched carbon nanostructures leads to high capacitance values in the fabricated interdigital structures. A significant rise in the capacitance up to 100 times is reported by means of branched carbon nanotubes. The high electron emission of such nanostructures over regular CNTs can be applied to realize high sensitivity sensors. To investigate the functionality of fabricated B-CNT-based actuator, both sensor and actuator configurations have been designed on a silicon-based membrane and the electromechanical response of the whole structure has been investigated. These structures show a superior actuation behavior owing to their high capacitance due to extensive overlapping fingers. (C) 2011 Elsevier B.V. All rights reserved.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available