Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 163, Issue 1, Pages 42-47Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2010.06.023
Keywords
Fabry-Perot sensor; Acoustic measurements; Fiber-optic sensor; Chitosan diaphragm
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A miniature fiber-optic Fabry-Perot is fabricated directly on the tip of a single mode fiber. The active sensing element is a thin linear polysaccharide (chitosan) diaphragm with thickness of only 1.5 mu m. The chitosan diaphragm exhibits excellent physicochemical properties that include membrane-forming ability, good adhesion, insensitive to background pressure and high mechanical strength. Together with fiber-optic Fabry-Perot interferometric's inherent advantages, the chitosan diaphragm-based Fabry-Perot sensor becomes a wonderful candidate for dynamic pressure measurement such as acoustic pressure. A chitosan diaphragm-based miniature Fabry-Perot system for acoustic pressure measurement is presented which exhibits high sensitivity of 0.002 V/mPa at 1 kHz with frequency response from range 20 Hz to 20 kHz. (C) 2010 Elsevier B.V. All rights reserved.
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