Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 160, Issue 1-2, Pages 132-140Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2010.04.011
Keywords
Aluminum nitride (AlN); Piezoelectric filters; Channel-select filters; Microelectromechanical systems (MEMS); Contour-mode resonators; Self-coupling
Funding
- Directorate For Engineering
- Div Of Electrical, Commun & Cyber Sys [0824128] Funding Source: National Science Foundation
- Div Of Electrical, Commun & Cyber Sys
- Directorate For Engineering [1237949] Funding Source: National Science Foundation
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This paper reports experimental results on single-chip multi-frequency channel-select filters based on self-coupled piezoelectric aluminum nitride (AIN) contour-mode microelectromechanical (MEMS) resonators. Two-port AlN contour-mode resonators are connected in series and electrically coupled using their intrinsic capacitance to realize multi-frequency (94-271 MHz), narrow bandwidth (similar to 0.2%), low insertion loss (similar to 2.3 dB), high off-band rejection (similar to 60 dB) and high linearity (IIP3 similar to 100 dBmV) channel-select filters on the same chip. This technology enables multi-frequency, high-performance and small-form-factor filter arrays and makes a single-chip multi-band reconfigurable radio frequency (RF) solution possible in the near future. (C) 2010 Elsevier B.V. All rights reserved.
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