Journal
SENSORS
Volume 14, Issue 6, Pages 9505-9521Publisher
MDPI AG
DOI: 10.3390/s140609505
Keywords
microfabrication; lift-off ears; electrochemical applications; multiple measuring sites
Funding
- Danish Council for Independent Research (Technology and Production Sciences)
- EU FP7 project EXCELL [NMP4-SL-2008-214706]
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In this paper we demonstrate the fabrication and electrochemical characterization of a microchip with 12 identical but individually addressable electrochemical measuring sites, each consisting of a set of interdigitated electrodes acting as a working electrode as well as two circular electrodes functioning as a counter and reference electrode in close proximity. The electrodes are made of gold on a silicon oxide substrate and are passivated by a silicon nitride membrane. A method for avoiding the creation of high edges at the electrodes (known as lift-off ears) is presented. The microchip design is highly symmetric to accommodate easy electronic integration and provides space for microfluidic inlets and outlets for integrated custom-made microfluidic systems on top.
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