Journal
SENSORS
Volume 13, Issue 2, Pages 1754-1762Publisher
MDPI
DOI: 10.3390/s130201754
Keywords
multi-walled carbon nanotube; CVD; sensor; NH3; catalyst
Funding
- Vietnam's National Foundation for Science and Technology Development (NAFOSTED) [103.02.99.09]
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Multi-walled carbon nanotube (MWCNT) film has been fabricated onto Pt-patterned alumina substrates using the chemical vapor deposition method for NH3 gas sensing applications. The MWCNT-based sensor is sensitive to NH3 gas at room temperature. Nanoclusters of Co catalysts have been sputtered on the surface of the MWCNT film to enhance gas sensitivity with respect to unfunctionalized CNT films. The gas sensitivity of Co-functionalized MWCNT-based gas sensors is thus significantly improved. The sensor exhibits good repeatability and high selectivity towards NH3, compared with alcohol and LPG.
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