4.6 Article

Suppression of Air Refractive Index Variations in High-Resolution Interferometry

Journal

SENSORS
Volume 11, Issue 8, Pages 7644-7655

Publisher

MDPI AG
DOI: 10.3390/s110807644

Keywords

refractometry; nanopositioning; interferometry; nanometrology

Funding

  1. Grant Agency of the Czech Republic [GA102/09/1276, GAP102/11/P820]
  2. Academy of Sciences of the Czech Republic [KAN311610701]
  3. Ministry of Education, Youth and Sports of the Czech Republic [LC06007]
  4. [AV0 Z20650511]

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The influence of the refractive index of air has proven to be a major problem on the road to improvement of the uncertainty in interferometric displacement measurements. We propose an approach with two counter-measuring interferometers acting as a combination of tracking refractometer and a displacement interferometer referencing the wavelength of the laser source to a mechanical standard made of a material with ultra-low thermal expansion. This technique combines length measurement within a specified range with measurement of the refractive index fluctuations in one axis. Errors caused by different position of the interferometer laser beam and air sensors are thus eliminated. The method has been experimentally tested in comparison with the indirect measurement of the refractive index of air in a thermal controlled environment. Over a 1 K temperature range an agreement on the level of 5 x 10(-8) has been achieved.

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