Journal
SENSORS
Volume 10, Issue 4, Pages 4040-4052Publisher
MDPI
DOI: 10.3390/s100404040
Keywords
electromagnetic actuator; impedance pump; magnetic PDMS diaphragm; MEMS
Funding
- National Science Council in Taiwan [NSC 98-2221-E-020-030, NSC 98-2218-E-110-001]
- Ministry of Economic Affairs in Taiwan. [98-EC-17-A-05-S2-0080]
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This study designs and analyzes an impedance pump utilizing an electromagnetic actuator. The pump is designed to have three major components, namely a lower glass substrate patterned with a copper micro-coil, a microchannel, and an upper glass cover plate attached a magnetic PDMS diaphragm. When a current is passed through the micro-coil, an electromagnetic force is established between the coil and the magnetic diaphragm. The resulting deflection of the PDMS diaphragm creates an acoustic impedance mismatch within the microchannel, which results in a net flow. In performing the analysis, simulated models of the magnetic field, the diaphragm displacement and the flow rate are developed using Ansoft/Maxwell3D, ANSYS FEA and FLUENT 6.3 CFD software, respectively. Overall, the simulated results reveal that a net flow rate of 52.8 mu L/min can be obtained using a diaphragm displacement of 31.5 mu m induced by a micro-coil input current of 0.5 A. The impedance pump proposed in this study provides a valuable contribution to the ongoing development of Lab-on-Chips (LoCs) systems.
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