Journal
SENSORS
Volume 10, Issue 7, Pages 7044-7056Publisher
MDPI
DOI: 10.3390/s100707044
Keywords
micro-cantilever; gas sensor; frequency shift; oscillator loop
Funding
- National 863 Project of China
- Science Fund of China Post Doctoral Scientists
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Micro-cantilever sensors for mass detection using resonance frequency have attracted considerable attention over the last decade in the field of gas sensing. For such a sensing system, an oscillator circuit loop is conventionally used to actuate the micro-cantilever, and trace the frequency shifts. In this paper, gas experiments are introduced to investigate the mechanical resonance frequency shifts of the micro-cantilever within the circuit loop(mechanical resonance frequency, MRF) and resonating frequency shifts of the electric signal in the oscillator circuit (system working frequency, SWF). A silicon beam with a piezoelectric zinc oxide layer is employed in the experiment, and a Self-Actuating-Detecting (SAD) circuit loop is built to drive the micro-cantilever and to follow the frequency shifts. The differences between the two resonating frequencies and their shifts are discussed and analyzed, and a coefficient. related to the two frequency shifts is confirmed.
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