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On-Line Metrology with Conoscopic Holography: Beyond Triangulation

Journal

SENSORS
Volume 9, Issue 9, Pages 7021-7037

Publisher

MDPI
DOI: 10.3390/s90907021

Keywords

optical metrology; conoscopic holography; industrial inspection

Funding

  1. European Union
  2. European Coal and Steel Community (ECSC) - now Research Fund for Coal and Steel (RFCS)
  3. the Fundacion para el Fomento en Asturias de la Investigacion Cientifica Aplicada y la Tecnologia (FICYT) [IB08-051]
  4. Ministerio de Ciencia e Innovacion of Spain [DPI2007-64243]

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On-line non-contact surface inspection with high precision is still an open problem. Laser triangulation techniques are the most common solution for this kind of systems, but there exist fundamental limitations to their applicability when high precisions, long standoffs or large apertures are needed, and when there are difficult operating conditions. Other methods are, in general, not applicable in hostile environments or inadequate for on-line measurement. In this paper we review the latest research in Conoscopic Holography, an interferometric technique that has been applied successfully in this kind of applications, ranging from submicrometric roughness measurements, to long standoff sensors for surface defect detection in steel at high temperatures.

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