Journal
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 28, Issue 9, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0268-1242/28/9/094005
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Funding
- International Program of Regional Innovation Cluster Program 'Tokai Region Nanotechnology Manufacturing Cluster'
- Global COE Program 'Frontiers of Intelligent Sensing' of the Ministry of Education, Culture, Sports, Science and Technology of Japan (MEXT)
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A high-quality AlGaN/GaN Schottky barrier photodetector was demonstrated on Si. The device exhibited a very low dark current of 0.94 fA at -2.5 V and 2.51 pA at -10 V. There were two spectral response peaks located at 280 and 340 nm, respectively, and the relative intensity of these peaks changed with applied bias. The responsivity exhibited optical power density dependence measured at 340 nm with different bias. The zero bias differential resistance of 3.63 x 10(13) Omega and area product is calculated to be 4.10 x 10(11) Omega cm(2). The excellent current-voltage characteristics led to a detectivity performance of 4.98 x 10(13) cm Hz(1/2) W-1.
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