4.4 Article

GaN-based LEDs with a high light extraction composite surface structure fabricated by a modified YAG laser lift-off technology and the patterned sapphire substrates

Journal

SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 26, Issue 8, Pages -

Publisher

IOP PUBLISHING LTD
DOI: 10.1088/0268-1242/26/8/085008

Keywords

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Funding

  1. National Key Basic Research Program of China [TG-2007CB307004, 2011CB301905]
  2. National Natural Science Foundation of China [61006035, 61076012, 60676032, 60607003]
  3. National High-Tech Research and Development Program of China [2009AA03A198]
  4. Postdoctoral Science Foundation of China [20090460168]

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Vertical structure LEDs have been fabricated with a novel light extraction composite surface structure composed of a micron grating and nano-structure. The composite surface structure was generated by using a modified YAG laser lift-off technique, separating the wafers from cone-shaped patterned sapphire substrates. LEDs thus fabricated showed the light output power increase about 1.7-2.5 times when compared with conventional vertical structure LEDs grown on plane sapphire substrates. A three-dimensional finite difference time domain method was used to simulate this new kind of LED device. It was determined that nano-structures in composite surface patterns play a key role in the improvement of light extraction efficiency of LEDs.

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