4.4 Article

Gold-enhanced oxidation of MBE-grown silicon nanowires

Journal

SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 23, Issue 7, Pages -

Publisher

IOP PUBLISHING LTD
DOI: 10.1088/0268-1242/23/7/075040

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Thermal oxidation of MBE-grown silicon nanowires with a gold droplet on their tips was investigated. Two kinds of oxidation behavior were observed: (i) enhanced axial oxidation, if there was a direct contact between the gold droplet and the nanowire, and (ii) conventional oxidation for nanowires when there was no direct contact between the gold and silicon. For a dry atmosphere, such enhanced oxidation takes place at temperatures down to 500 degrees C. Under a wet atmosphere, remarkable oxidation was observed even for temperatures down to 250 degrees C.

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