Journal
SCRIPTA MATERIALIA
Volume 67, Issue 2, Pages 197-200Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.scriptamat.2012.04.017
Keywords
Nanometer chip; Ultrafine grit; TEM; HgCdTe; Nanogrinding
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Funding
- National Natural Science Foundation of China [91123013]
- Science and Technology Program of Dalian City of China [2009A18GX014]
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Face nanogrinding was conducted on HgCdTe films using a novel ultrafine diamond wheel that we have developed. Damage-free subsurface was achieved after direct face nanogrinding. Two undeformed nanometer chips with rectangular cross-section were observed. The chip thickness varies from 25 to 28 nm, corresponding to a chip width/thickness ratio ranging from 3.2 to 3.4. A novel model of maximum undeformed chip thickness for face grinding was constructed, and the calculated results are consistent with those found experimentally. (C) 2012 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
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