Journal
SCRIPTA MATERIALIA
Volume 67, Issue 7-8, Pages 657-660Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.scriptamat.2012.07.016
Keywords
Nanoparticle; Transmission electron microscopy; Nanogrinding; Silicon; Undeformed chip thickness
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Funding
- National Natural Science Foundation of China [91123013, 50975040]
- Science and Technology Program of Dalian City, China [2009A18GX014]
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Crystalline nanoparticles of silicon (Si) were achieved by face nanogrinding with ultrafine diamond grits in deionized water at room temperature. Si nanoparticles with an average size of 19.1 nm were observed and confirmed. The average ratio between width and thickness for the nanoparticles formed was 1.32. A size prediction model for Si nanoparticles was proposed based on the fundamental mechanism of face grinding, as well as undeformed chip thickness. The sizes of nanoparticles determined by calculation and experimentally were consistent. (c) 2012 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
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