Journal
SCRIPTA MATERIALIA
Volume 65, Issue 7, Pages 596-599Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.scriptamat.2011.06.034
Keywords
Fatigue; Thin films; Coatings; Silicon
Categories
Funding
- Div Of Civil, Mechanical, & Manufact Inn
- Directorate For Engineering [0758554] Funding Source: National Science Foundation
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The fatigue properties of monocrystalline Si thin films coated with nanoscale alumina layers (ranging from 4.2 to 50 nm) are compared to those of uncoated Si films, in air at 30 degrees C, 50% relative humidity (RH) and 80 degrees C, 90% RH. The presence of alumina coatings results in more than two orders of magnitude longer fatigue lives, even though subcritical cracking of alumina occurs. The effects of the alumina coating thickness on the overall fatigue degradation behavior are discussed. (C) 2011 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
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