Journal
SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS
Volume 10, Issue 3, Pages -Publisher
TAYLOR & FRANCIS LTD
DOI: 10.1088/1468-6996/10/3/034501
Keywords
nanoelectromechanical device; nanotool; focused ion beam (FIB); diamond-like carbon (DLC); manipulator; work function; emitter; Rutherford backscattering spectroscopy-elastic recoil detection analysis (RBS/ERDA); electron energy loss spectroscopy (EELS); Young's modulus; density
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Nanoelectromechanical devices, which can be used as nanotools in nanofactories, were fabricated by focused ion beam chemical vapor deposition (FIB-CVD). The devices are made of diamond-like carbon (DLC), deposited on a Si substrate using gasified phenanthrene (C14H10) as a carbon source. The Young modulus and density of the deposited DLC were measured as 190 GPa and 3(8 g cm(-3), respectively. The work function was smaller for DLC (2.9 eV) than for W (4.7 eV) and Fe (5.2 eV) deposited by FIB-CVD. A nanomanipulator was manufactured by FIB-CVD and used for actual manipulations. A glass capillary based local field emitter was developed and produced as a tool for spot deposition, and its electron field emission was confirmed. FIB-CVD is proven as an efficient fabrication technology of novel nanoelectromechanical devices.
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