Journal
SCIENCE
Volume 323, Issue 5917, Pages 1030-1033Publisher
AMER ASSOC ADVANCEMENT SCIENCE
DOI: 10.1126/science.1168108
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Funding
- U.S. Department of Energy (DOE) [DE-FG-0296ER45612, DE-FG-0296ER42126, DE-AC02-05CH11231]
- NSF-supported Materials Research Science and Engineering Center [DMR-0820506]
- Nanoscale Science and Engineering Center [DMI-0531171]
- University of Massachusetts, Amherst
- DOE
- Office of Science
- Office of Basic Energy Sciences [DE-AC02-05CH11231]
- Korea Science and Engineering Foundation [R11-2007-05002004-0]
- Direct For Mathematical & Physical Scien
- Division Of Materials Research [820506] Funding Source: National Science Foundation
- National Research Foundation of Korea [2007-0056558] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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Generating laterally ordered, ultradense, macroscopic arrays of nanoscopic elements will revolutionize the microelectronic and storage industries. We used faceted surfaces of commercially available sapphire wafers to guide the self- assembly of block copolymer microdomains into oriented arrays with quasi- long- range crystalline order over arbitrarily large wafer surfaces. Ordered arrays of cylindrical microdomains 3 nanometers in diameter, with areal densities in excess of 10 terabits per square inch, were produced. The sawtoothed substrate topography provides directional guidance to the self- assembly of the block copolymer, which is tolerant of surface defects, such as dislocations. The lateral ordering and lattice orientation of the single- grain arrays of microdomains are maintained over the entire surface. The approach described is parallel, applicable to different substrates and block copolymers, and opens a versatile route toward ultrahigh- density systems.
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