Journal
OPTICAL MATERIALS EXPRESS
Volume 5, Issue 12, Pages 2798-2803Publisher
Optica Publishing Group
DOI: 10.1364/OME.5.002798
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Funding
- Canada Excellence Research Chair (CERC) initiative
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Plasmonic metasurfaces are often limited in their application by poor device performance, which is caused - in part - by deviations between fabricated devices and the ideal design. We show in this letter that these deviations are reduced significantly by shape-correction, intra-structure proximity error correction. We show experimentally that the fabrication fidelity alone is not a good indicator of the device quality and that direct measurements of the optical performance are necessary. Our fabrication improvements result in increased optical performance, reaching a measurement fidelity as high as 90%. (C) 2015 Optical Society of America
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