Journal
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 81, Issue 5, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3428739
Keywords
foils; X-ray fluorescence analysis; X-ray spectrometers
Categories
Funding
- TU Wien
- ANNA project
Ask authors/readers for more resources
Since most available micro x-ray fluorescence (micro-XRF) spectrometers operate in air, which does not allow the analysis of low-Z elements (Z <= 14), a special micro-XRF spectrometer has been designed to extend the analytical range down to light elements (Z >= 6). It offers improved excitation and detection conditions necessary for light element analysis. To eliminate absorption of the exciting and fluorescent radiation, the system operates under vacuum condition. Sample mapping is automated and controlled by specialized computer software developed for this spectrometer. Several different samples were measured to test and characterize the spectrometer. The spot size has been determined by scans across a 10 mu m Cu wire which resulted in a full width at half maximum of 31 mu m for Mo K alpha line (17.44 keV) and 44 mu m effective beam size for the Cu K edge and 71 mu m effective beam size for the Cu L edge. Lower limits of detection in the picogram range for each spot (or mu g/cm(2)) were obtained by measuring various thin metal foils under different conditions. Furthermore, detection limits in the parts per million range were found measuring NIST621 standard reference material. Area scans of a microscopic laser print and NaF droplet were performed to show mapping capabilities. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3428739]
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available