4.7 Article

Quantum lithography: status of the field

Journal

QUANTUM INFORMATION PROCESSING
Volume 11, Issue 4, Pages 891-901

Publisher

SPRINGER
DOI: 10.1007/s11128-011-0253-y

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Funding

  1. Multidisciplinary University Research Initiative award
  2. Direct For Mathematical & Physical Scien
  3. Division Of Physics [0968895] Funding Source: National Science Foundation

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This contribution provides an analysis of progress in the field of quantum lithography. We review the conceptual foundations of this idea and the status of research aimed at implementing this idea in the laboratory. The selection of a highly sensitive recording material that functions by means of multiphoton absorption seems crucial to the success of the proposal of quantum lithography. This review thus devotes considerable attention to these materials considerations.

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