Journal
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
Volume 34, Issue 3, Pages 627-633Publisher
ELSEVIER SCIENCE INC
DOI: 10.1016/j.precisioneng.2010.03.005
Keywords
Piezoelectric devices; Fuzzy logic; Neural network; Nonlinearity; Ultra-precision positioning system
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Funding
- National Natural Science Foundation of China [50575178]
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The aim of this paper is to improve the positioning accuracy of the micro-positioning stage constructed by flexure hinge and driven by piezoelectric devices. The micro-positioning stage is the micro-stage of an two-dimensional ultra-precision positioning system with high-speed and large range, which is a typical macro-micro-dual-drive system. Because of the strong nonlinearity of the micro-positioning stage, such as hysteresis and creep, and the influence of the highly accelerated operation of the macro-positioning stage, the traditional PID control cannot achieve good performance. To solve this problem, a PID position controlling system based on adaptive neural-fuzzy inference has been proposed and the structure of this control system is also analyzed. The experimental results show that the performance is effectively improved under the intelligent control method. The repetitive positioning accuracy is improved from 92 nm to 23 nm at the axis X and from 102 nm to 28 nm at the axis Y. (C) 2010 Elsevier Inc. All rights reserved,
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