Journal
POLYMER
Volume 53, Issue 21, Pages 4834-4842Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.polymer.2012.08.050
Keywords
Bead-spring model; Elongation; Elastic modulus
Categories
Funding
- [23710148]
- Grants-in-Aid for Scientific Research [23710148] Funding Source: KAKEN
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The mechanical properties of an epoxy-based chemically amplified resists with various cross-linking ratios were simulated using a newly developed coarse-grained molecular dynamics simulation that employs a bead-spring model. Models with the different cross-linking ratios were created in the molecular dynamics calculation step and uniaxial elongation simulations were performed. The results reveal that the simulated elastic modulus of the resist modeled by the Kremer-Grest model with an extended angle bending potential depends on the cross-linking ratio, its dependency exhibits good agreement with that determined by nanoindentation tests. (c) 2012 Elsevier Ltd. All rights reserved.
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