Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 17, Issue 3, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0963-0252/17/3/035026
Keywords
-
Categories
Ask authors/readers for more resources
A comparison is made between plasma parameters measured with a retarding field energy analyzer ( RFEA), mounted at a grounded electrode in an inductive discharge, and a Langmuir probe located in bulk plasma close to the analyzer. Good agreement between measured plasma parameters is obtained for argon gas pressure in the range 2-10mTorr. Parameters compared include time averaged plasma potential, the tail of the electron energy distribution function (EEDF), the electron temperature and the ion flux. This highlights the versatility of the RFEA for determining plasma parameters adjacent to the surface where probe measurements are not easily made. Combination of the probe and energy analyzer has enabled the measurement of the EEDF to a higher energy than otherwise possible.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available