Journal
PLASMA PROCESSES AND POLYMERS
Volume 6, Issue -, Pages S700-S704Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/ppap.200931702
Keywords
barrier; food packaging; gas permeation; microwave discharges; silicon oxide
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Deposition of SiO(x) layers by low-pressure microwave plasmas is an excellent means to add missing barrier functionalities to cheap and material-saving homo-polymeric materials that will increasingly replace expensive multi-layer polymer food packaging. SiO(x) coatings were deposited in an ECR plasma process on polyethyleneterephthalate (PET) foils using two different precursors, HMDSO and HMDSN. O(2) transition rates of less than 1 cm(3) (m(-2).24 h(-1).bar(-1)) were obtained for the best performing SiO(x) coatings deposited from O(2)/HMDSN gas mixtures. First ECR plasma deposition tests on polypropylene (PP) trays show the high barrier potential of SiO(x) coatings even on three-dimensional polymer food packaging.
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