Development of Graded Low Friction SiCN Coatings with Extended High Temperature Stability above 1200 degrees C

The authors developed a coating concept based on amorphous Si/C/N coatings, with promising high temperature properties. Due to a graded coating design, the adhesion, the coating hardness as well as the coefficient of friction were optimized. The coatings showed excellent high temperature stability against chemical decomposition, structural changes and surface oxidation up to 1Y350 degrees C. To allow the deposition of coatings with a certain chemical composition, a numerical relationship between the composition of the coatings and deposition parameters was established.