Journal
PHYSICS LETTERS A
Volume 375, Issue 32, Pages 2903-2910Publisher
ELSEVIER
DOI: 10.1016/j.physleta.2011.06.020
Keywords
MEMS; Resonator; Electrostatic actuation; Bounded noise; Chaos
Categories
Funding
- Shanghai Rising-Star Program [11QA1403400]
- National Science Foundation of China [11072147]
- Japan Society for the Promotion of Science
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In this Letter, nonlinear dynamic and chaotic behaviors of electrostatically actuated MEMS resonators subjected to random disturbance are investigated analytically and numerically. A reduced-order model, which includes nonlinear geometric and electrostatic effects as well as random disturbance, for the resonator is developed. The necessary conditions for the rising of chaos in the stochastic system are obtained using random Melnikov approach. The results indicate that very rich random quasi-periodic and chaotic motions occur in the resonator system. The threshold of bounded noise amplitude for the onset of chaos in the resonator system increases as the noise intensity increases. (C) 2011 Elsevier B.V. All rights reserved.
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