Cavity Optomechanics with Stoichiometric SiN Films

We study high-stress SiN films for reaching the quantum regime with mesoscopic oscillators connected to a room-temperature thermal bath, for which there are stringent requirements on the oscillators' quality factors and frequencies. Our SiN films support mechanical modes with unprecedented products of mechanical quality factor Q(m) and frequency nu(m) reaching Q(m)nu(m)similar or equal to 2x10(13) Hz. The SiN membranes exhibit a low optical absorption characterized by Im(n)less than or similar to 10(-5) at 935 nm, representing a 15 times reduction for SiN membranes. We have developed an apparatus to simultaneously cool the motion of multiple mechanical modes based on a short, high-finesse Fabry-Perot cavity and present initial cooling results along with future possibilities.