Journal
PHYSICAL REVIEW E
Volume 78, Issue 2, Pages -Publisher
AMER PHYSICAL SOC
DOI: 10.1103/PhysRevE.78.026410
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Funding
- RFBR-Flanders [05-02-19809-MFa]
- RFBR-Ukraine [08-02-90446-Uka]
- Deutsche Forschungsgemeinschaft [GK 1051, SFB 591]
- Belgian Science Policy (IAP)
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We present experimental and numerical studies of the properties of a capacitively coupled 13.56 MHz discharge in a mixture of Ar and C2H2 with growing nanosize particles. It is found that at the initial stage of the growth, nanoparticles are accumulated near the sheath-plasma boundaries, where the ionization by electrons is maximal. The nanoparticles suppress the ionization due to the absorbing fast electrons and stimulate a quick change of the plasma parameters followed by a transition between different modes of discharge operation. At that moment the peaked distribution of the dust particles transforms into a flat one.
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