4.5 Article

Low-cost high-quality crystalline germanium based flexible devices

Journal

PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS
Volume 8, Issue 9, Pages 794-800

Publisher

WILEY-V C H VERLAG GMBH
DOI: 10.1002/pssr.201409257

Keywords

germanium; flexible electronics; thin films; CMOS

Funding

  1. KAUST OCRF Competitive Research Grant (CRG) [1 CRG-1-2012-HUS-008]

Ask authors/readers for more resources

High performance flexible electronics promise innovative future technology for various interactive applications for the pursuit of low-cost, light-weight, and multi-functional devices. Thus, here we show a complementary metal oxide semiconductor (CMOS) compatible fabrication of flexible metal-oxide-semiconductor capacitors (MOSCAPs) with high-/metal gate stack, using a physical vapor deposition (PVD) cost-effective technique to obtain a high-quality Ge channel. We report outstanding bending radius approximate to 1.25 mm and semi-transparency of 30%. ((c) 2014 WILEY-VCH Verlag GmbH &Co. KGaA, Weinheim)

Authors

I am an author on this paper
Click your name to claim this paper and add it to your profile.

Reviews

Primary Rating

4.5
Not enough ratings

Secondary Ratings

Novelty
-
Significance
-
Scientific rigor
-
Rate this paper

Recommended

No Data Available
No Data Available