Journal
PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS
Volume 248, Issue 2, Pages 370-374Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/pssb.201046614
Keywords
atomic force microscopy; scanning thermal microscopy
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In this paper, a novel micromachined scanning thermal microscopy (SThM) microcantilever with a sharp, conductive platinum tip is proposed for temperature and thermal conductivity measurements in sub-micron structures of micro- and nanoelectronic components. The idea and physical background of SThM operation is presented, together with brief description of probes and example images of a planar polycrystalline-silicon microfuse obtained using passive- and active-mode SThM. (C) 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
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