Journal
PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS
Volume 246, Issue 8, Pages 1758-1767Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/pssb.200982003
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The history of the development of photoresists based on the photostructural transformations in chalcogenide glassy semiconductors is discussed in this paper. The properties of such photoresists including the possibility of an essential increase of their photosensitivity and also applications are examined. Together with the photoresists, the chalcogenide glassy roentgen-, electron beam-, and plasma-resists are briefly considered. (C) 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
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