Journal
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
Volume 208, Issue 12, Pages 2920-2925Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/pssa.201127362
Keywords
indium tin oxide; inkjet printing; ITO; organic field effect transistors; transparent conductive oxides
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Indium tin oxide (ITO) thin films can be manufactured by spincoating or inkjet printing of a solution containing indium and tin oximato precursor complexes. After sintering at 600 degrees C and annealing in reducing atmosphere, resistivities as low as 2.34 x 10-3Ocm were observed, with a transparency of more than 95% in the visible region. The employment of an amorphous hafnia interlayer on top of a silicon dioxide dielectric was found to improve the wetting behaviour significantly. Thus sourcedrain structures could be obtained by inkjet-printing and field-effect transistors were constructed using poly(3-hexylthiophene) (P3HT) as organic semiconductor.
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