Journal
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
Volume 205, Issue 8, Pages 1783-1786Publisher
WILEY-BLACKWELL
DOI: 10.1002/pssa.200723608
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Thin-films of Ni(x)Zn(1-x)Fe(2)O(4) [(Ni,Zn)-ferrite] are grown by means of RF sputtering on Si(100) and (111) substrates, corresponding to the orientation of Si cantilevers for AFM/MFM measurements. We find that the ferrite can be sputtered directly onto the Si surfaces, but ail additional annealing step is required to obtain a purely polycrystalline, soft magnetic film. The microstructure of the films is investigated employing transmission electron microscopy, electron backscatter diffraction and magnetic force microscopy. (C) 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
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