Journal
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
Volume 205, Issue 4, Pages 876-879Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/pssa.200777832
Keywords
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Funding
- National Research Foundation of Korea [2006-02342, 핵06A2803] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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Spectroscopic ellipsometry (SE) is applied to characterize Si columnar nanostructures. By employing effective medium approximation (EMA) theory, Si nanorods are treated as a graded layer with each sub-layer modeled as a mixture of Si and voids with varying porosity fraction. In addition, the rigorous coupled-wave analysis and finite-element Green's function method were used in modeling Si nanorods as a stack of disks with varying diameters and thicknesses, and the calculations are in satisfactory agreement with the measurement results. (C) 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
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