Journal
ULTRAMICROSCOPY
Volume 151, Issue -, Pages 122-129Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.ultramic.2014.11.009
Keywords
Scanning transmission electron microscopy (STEM); Annular dark-field (ADF); Atomic-depth resolution imaging; Surface imaging
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Funding
- Office of Science of the U.S. DOE [DE-AC02- 05CH11231]
- Materials Science and Engineering Division of the US Department of Energy
- Grants-in-Aid for Scientific Research [25106003, 15K18202] Funding Source: KAKEN
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To fully understand and control materials and their properties, it is of critical importance to determine their atomic structures in all three dimensions. Recent revolutionary advances in electron optics - the inventions of geometric and chromatic aberration correctors as well as electron source monochromators - have provided fertile ground for performing optical depth sectioning at atomic-scale dimensions. In this study we theoretically demonstrate the imaging of top/sub-surface atomic structures and identify the depth of single clopants, single vacancies and the other point defects within materials by large-angle illumination scanning transmission electron microscopy (LAl-STEM). The proposed method also allows us to measure specimen properties such as thickness or three-dimensional surface morphology using observations from a single crystallographic orientation. (C) 2014 Elsevier B.V. All rights reserved.
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