Journal
ULTRAMICROSCOPY
Volume 148, Issue -, Pages 158-167Publisher
ELSEVIER
DOI: 10.1016/j.ultramic.2014.10.010
Keywords
Energy dispersive X-ray spectrometry; Focused ion beam; Tomographic spectral imaging; 3D chemical analysis; 3D microanalysis; Quantification 3D image analysis
Categories
Funding
- European Research Council under the European Union's Seventh Framework Programme (FP7)/ERC [291522-3DlMAGE]
- EPSRC [EP/E012477/1, EP/H022309/1, EP/H500375/1]
- Rolls-Royce plc
- EPSRC [EP/E012477/1, EP/H500375/1] Funding Source: UKRI
- Engineering and Physical Sciences Research Council [EP/E012477/1, 1147675, EP/H500375/1] Funding Source: researchfish
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An enhanced method to quantify energy dispersive spectra recorded in 3D with a scanning electron microscope (3D SEM-EDS) has been previously demonstrated. This paper presents an extension of this method using all the available X-ray lines generated by the beam. The extended method benefits from using high energy lines, that are more accurately quantified, and from using soft X-rays that are highly absorbed and thus more surface sensitive. The data used to assess the method are acquired with a dual beam FIB/SEM investigating a multi-element Ni-based superalloy. A high accelerating voltage, needed to excite the highest energy X-ray line, results in two available X-ray lines for several elements. The method shows an improved compositional quantification as well as an improved spatial resolution. (C) 2014 The Authors. Published by Elsevier B.V. This is an open access article under the CC BY license
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